상온에서 작동하는 자외선 수광, 발광소자용 ZnO박막의 제조방법 및  그를 위한 장치

Author
최원국정형진송종한윤영수김경국
Assignee
한국과학기술연구원
Regitration Date
2002-03-19
Registration No.
6,358,378
Application Date
2001-01-24
Application No.
09/767,822
Country
US
URI
https://pubs.kist.re.kr/handle/201004/91349
Appears in Collections:
KIST Patent > 2001
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