DSpace at KISTKIST Patent2018

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dc.contributor.author도정만-
dc.contributor.author윤진국-
dc.contributor.author최영준-
dc.contributor.author유병용-
dc.contributor.author한승희-
dc.date.accessioned2024-01-12T17:01:48Z-
dc.date.available2024-01-12T17:01:48Z-
dc.date.issued2020-08-21-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/91974-
dc.title실리콘 웨이퍼 및 반도체 반응기용 알루미늄 합금 및 내식/내침식 PEO 코팅-
dc.typePatent-
dc.date.registration2020-08-21-
dc.date.application2018-01-09-
dc.identifier.patentRegistrationNumberZL 201810018154.1-
dc.identifier.patentApplicationNumber201810018154.1-
dc.publisher.countryCC-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2018
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