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dc.contributor.authorLee Soonjae-
dc.contributor.author박완근-
dc.contributor.authorChoi Jae Woo-
dc.contributor.authorLee, Sanghyup-
dc.date.accessioned2024-01-12T17:05:36Z-
dc.date.available2024-01-12T17:05:36Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/92277-
dc.publisher한국화학공학회-
dc.subject기체분리-
dc.subject분리막-
dc.subject폐가스-
dc.subject온실기체-
dc.subjectSF6-
dc.subjectCF4-
dc.subjectCO2-
dc.title.alternative분리막을 이용한 반도체 디스플레이 폐가스 내 온실기체 (SF6, CF4, CO2) 분리-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국화학공학회 2014년 봄 총회 및 학술대회-
dc.citation.title한국화학공학회 2014년 봄 총회 및 학술대회-
dc.citation.conferencePlaceKO-
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