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Development of a Coherent EUV Light Source for EUV Mask Inspection

Other Titles

EUV 마스크 검사용 Coherent EUV 광원 개발

Authors

Kim Yong Soo; Ahn Joonmo; 성하민; Cho, Woon Jo; Park, Min-Chul; 김점술; KIM, JAE HUN; Woo, Deok Ha; Lee, Seok; Ju Han LEE; Kim, Yong Tae; Jhon, Young Min

Citation

2014 한국반도체학회

Keywords

EUV; HHG

URI

https://pubs.kist.re.kr/handle/201004/92328

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KIST Conference Paper > Others

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