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dc.contributor.author김점술-
dc.contributor.author함용희-
dc.contributor.author정재룡-
dc.contributor.author권승호-
dc.contributor.authorSung Hamin-
dc.contributor.authorKim Yong Soo-
dc.contributor.authorJhon, Young Min-
dc.date.accessioned2024-01-12T17:34:54Z-
dc.date.available2024-01-12T17:34:54Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/92794-
dc.languageEnglish-
dc.subject고차조화파-
dc.subject극자외선-
dc.subject분광기-
dc.titleDesign and Construction of an EUV Grating Spectrometer for the High Harmonic Generation at 13.5 nm-
dc.title.alternative고차조화파발생 13.5nm 극자외선 회절격자분광기 설계제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation차세대 리소그래피 학술대회, v.F2-III-3, pp.72 - 73-
dc.citation.title차세대 리소그래피 학술대회-
dc.citation.volumeF2-III-3-
dc.citation.startPage72-
dc.citation.endPage73-
dc.citation.conferencePlaceKO-
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