KIST Library Institutional Repository

플라스마 증착장치 및 방법

Author

이욱성; 백영준; 정증현; 황규원; 박종극

Assignee

한국과학기술연구원

Regitration Date

2015-03-10

Registration No.

8,973,526

Application Date

2007-12-10

Application No.

11/953,348

Country

US

URI

https://pubs.kist.re.kr/handle/201004/93106

Appears in Collections:

KIST Patent > 2007

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