내산화성 및 내마모성이 우수한 TiAlN계 다층 경질박막

Author
박종극백영준
Assignee
한국과학기술연구원
Regitration Date
2006-09-13
Registration No.
0626406
Application Date
2004-12-10
Application No.
2004-0104422
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/93224
Appears in Collections:
KIST Patent > 2004
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