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dc.contributor.author변영태-
dc.contributor.author김형권-
dc.contributor.author우형주-
dc.contributor.author김선호-
dc.contributor.author우덕하-
dc.date.accessioned2024-01-12T18:03:29Z-
dc.date.available2024-01-12T18:03:29Z-
dc.date.issued2005-12-22-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/93249-
dc.title실리콘 박막분리를 위한 표면기포 형성 방법-
dc.typePatent-
dc.date.registration2005-12-22-
dc.date.application2004-03-09-
dc.identifier.patentRegistrationNumber0539465-
dc.identifier.patentApplicationNumber2004-0015790-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2004
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