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dc.contributor.author이승철-
dc.contributor.author김상필-
dc.contributor.author이광렬-
dc.date.accessioned2024-01-12T18:30:15Z-
dc.date.available2024-01-12T18:30:15Z-
dc.date.issued2007-05-02-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/93539-
dc.title다층박막 제조방법-
dc.typePatent-
dc.date.registration2007-05-02-
dc.date.application2003-10-28-
dc.identifier.patentRegistrationNumber0716104-
dc.identifier.patentApplicationNumber2003-0075402-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2003
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