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dc.contributor.author김용태-
dc.contributor.author민석기-
dc.date.accessioned2024-01-12T18:32:59Z-
dc.date.available2024-01-12T18:32:59Z-
dc.date.issued1995-09-20-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/93762-
dc.title텡스텐　질화박막을　베리어　메탈로　이용한　실리콘　반도체　소자의　알루미늄금속배선　형성　방법-
dc.typePatent-
dc.date.registration1995-09-20-
dc.date.application1992-05-16-
dc.identifier.patentRegistrationNumber89415-
dc.identifier.patentApplicationNumber92-8319-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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