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dc.contributor.author이창우-
dc.contributor.author김용태-
dc.date.accessioned2024-01-12T18:33:46Z-
dc.date.available2024-01-12T18:33:46Z-
dc.date.issued1997-07-02-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/93820-
dc.title램프가열　및　회전식기판을　이용한　박막제조방법　및　장치-
dc.typePatent-
dc.date.registration1997-07-02-
dc.date.application1993-12-21-
dc.identifier.patentRegistrationNumber117421-
dc.identifier.patentApplicationNumber93-28840-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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