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dc.contributor.author조운조-
dc.contributor.author최상삼-
dc.contributor.author한택상-
dc.contributor.author김영환-
dc.date.accessioned2024-01-12T19:00:23Z-
dc.date.available2024-01-12T19:00:23Z-
dc.date.issued1998-09-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/94115-
dc.title박막제조용　진공장치의　산소분압측정　방법　및　장치-
dc.typePatent-
dc.date.registration1998-09-01-
dc.date.application1995-12-14-
dc.identifier.patentRegistrationNumber162871-
dc.identifier.patentApplicationNumber95-49978-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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