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dc.contributor.authorSung Hamin-
dc.contributor.authorKim Yong Soo-
dc.contributor.authorCho, Woon Jo-
dc.contributor.authorPark, Min-Chul-
dc.contributor.author함용희-
dc.contributor.author김점술-
dc.contributor.authorKIM, JAE HUN-
dc.contributor.authorWoo, Deok Ha-
dc.contributor.authorLee, Seok-
dc.contributor.author이주한-
dc.contributor.authorKim, Yong Tae-
dc.contributor.authorJhon, Young Min-
dc.date.accessioned2024-01-12T19:04:10Z-
dc.date.available2024-01-12T19:04:10Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/94395-
dc.languageEnglish-
dc.subjectHigh Harmonic Generation-
dc.subjectnull-
dc.subjectExtreme Ultra Violet-
dc.titleDevelopment of Coherent EUV Light Source for EUV Metrology-
dc.title.alternative극자외선 측정기술용 결맞는 극자외선 광원개발-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation차세대 리소그래피 학술대회, v.2, pp.113 - 114-
dc.citation.title차세대 리소그래피 학술대회-
dc.citation.volume2-
dc.citation.startPage113-
dc.citation.endPage114-
dc.citation.conferencePlaceKO-
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