Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee | - |
| dc.contributor.author | Hwang, Seung Sang | - |
| dc.contributor.author | Baek Kyung Youl | - |
| dc.date.accessioned | 2024-01-12T19:05:59Z | - |
| dc.date.available | 2024-01-12T19:05:59Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/94540 | - |
| dc.language | English | - |
| dc.title | Ladder-like Polymethylsilsesquioxane (PMSQ) for Interlayer Dielectric (ILD) Application | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | 222nd ECS meeting | - |
| dc.citation.title | 222nd ECS meeting | - |
| dc.citation.conferencePlace | US | - |
- Appears in Collections:
- KIST Conference Paper > Others
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