Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hun-su Lee | - |
| dc.contributor.author | Yun-seong Lee | - |
| dc.contributor.author | Hong-young Chang | - |
| dc.date.accessioned | 2024-01-12T19:34:54Z | - |
| dc.date.available | 2024-01-12T19:34:54Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/95014 | - |
| dc.language | English | - |
| dc.title | Spatial control of RF capacitively coupled plasma using divided multi-holed electrode | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | 한국진공학회 | - |
| dc.citation.title | 한국진공학회 | - |
| dc.citation.conferencePlace | KO | - |
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