DSpace at KISTKIST Conference PaperOthers

Full metadata record

DC Field Value Language
dc.contributor.authorHun-su Lee-
dc.contributor.authorYUN SEONG LEE-
dc.contributor.authorSANG HUN SEO-
dc.contributor.authorHONG YOUNG CHANG-
dc.date.accessioned2024-01-12T19:34:56Z-
dc.date.available2024-01-12T19:34:56Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/95016-
dc.languageEnglish-
dc.subjectPlasma-
dc.subjectCCP-
dc.subjectelectron density-
dc.titleRF capacitively coupled plasma with multi-hole multi electrode-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationGEC-
dc.citation.titleGEC-
dc.citation.conferencePlaceUS-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE