DSpace at KISTKIST Patent2012

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dc.contributor.author이도권-
dc.contributor.author김홍곤-
dc.contributor.author김진영-
dc.contributor.author김봉수-
dc.contributor.author고민재-
dc.date.accessioned2024-01-12T20:02:49Z-
dc.date.available2024-01-12T20:02:49Z-
dc.date.issued2014-02-27-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/95426-
dc.titleCIS계 박막 코팅 장치-
dc.typePatent-
dc.date.registration2014-02-27-
dc.date.application2012-10-19-
dc.identifier.patentRegistrationNumber10-1370637-
dc.identifier.patentApplicationNumber10-2012-0116573-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2012
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