DSpace at KISTKIST Patent2012

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dc.contributor.author하승규-
dc.contributor.author김수연-
dc.contributor.author송진동-
dc.contributor.author최원준-
dc.contributor.author한일기-
dc.date.accessioned2024-01-12T20:03:19Z-
dc.date.available2024-01-12T20:03:19Z-
dc.date.issued2013-10-23-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/95465-
dc.title희생적 식각 마스크를 이용한 나노 구조물 제조방법-
dc.typePatent-
dc.date.registration2013-10-23-
dc.date.application2012-07-26-
dc.identifier.patentRegistrationNumber1323218-
dc.identifier.patentApplicationNumber2012-0081674-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2012
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