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dc.contributor.author임정아-
dc.contributor.author홍재민-
dc.contributor.author김학성-
dc.contributor.author최희덕-
dc.contributor.author송용원-
dc.date.accessioned2024-01-12T20:03:55Z-
dc.date.available2024-01-12T20:03:55Z-
dc.date.issued2013-02-06-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/95507-
dc.title패턴 형성 방법 및 패턴 형성 장치-
dc.typePatent-
dc.date.registration2013-02-06-
dc.date.application2011-08-03-
dc.identifier.patentRegistrationNumber10-1232837-
dc.identifier.patentApplicationNumber10-2011-0077506-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2011
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