Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 임정아 | - |
dc.contributor.author | 홍재민 | - |
dc.contributor.author | 김학성 | - |
dc.contributor.author | 최희덕 | - |
dc.contributor.author | 송용원 | - |
dc.date.accessioned | 2024-01-12T20:03:55Z | - |
dc.date.available | 2024-01-12T20:03:55Z | - |
dc.date.issued | 2013-02-06 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/95507 | - |
dc.title | 패턴 형성 방법 및 패턴 형성 장치 | - |
dc.type | Patent | - |
dc.date.registration | 2013-02-06 | - |
dc.date.application | 2011-08-03 | - |
dc.identifier.patentRegistrationNumber | 10-1232837 | - |
dc.identifier.patentApplicationNumber | 10-2011-0077506 | - |
dc.publisher.country | KO | - |
dc.type.iprs | 특허 | - |
dc.contributor.assignee | 한국과학기술연구원 | - |
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