DSpace at KISTKIST Patent2004

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dc.contributor.author신현준-
dc.contributor.author문성욱-
dc.date.accessioned2024-01-12T20:34:09Z-
dc.date.available2024-01-12T20:34:09Z-
dc.date.issued2006-11-30-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/96095-
dc.title경사구조 프로브 팁을 이용한 반도체 검사장치 제조방법-
dc.typePatent-
dc.date.registration2006-11-30-
dc.date.application2004-10-13-
dc.identifier.patentRegistrationNumber0654760-
dc.identifier.patentApplicationNumber2004-0081903-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2004
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