KIST Library Institutional Repository

미러　반사를　이용한　수평구조형　노광장치

Author

박종연; 문성욱

Assignee

한국과학기술연구원

Regitration Date

2003-10-01

Registration No.

401553

Application Date

2001-06-21

Application No.

01-35360

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/96508

Appears in Collections:

KIST Patent > 2001

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