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dc.contributor.author안효석-
dc.contributor.author김충현-
dc.contributor.author김두인-
dc.date.accessioned2024-01-12T21:02:28Z-
dc.date.available2024-01-12T21:02:28Z-
dc.date.issued2003-10-14-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/96522-
dc.title와이어 에칭장치 및 그 방법-
dc.typePatent-
dc.date.registration2003-10-14-
dc.date.application2001-05-15-
dc.identifier.patentRegistrationNumber6,632,348-
dc.identifier.patentApplicationNumber09/854,553-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2001
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