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dc.contributor.author민석기-
dc.contributor.author김무성-
dc.contributor.author김용-
dc.date.accessioned2024-01-12T21:03:38Z-
dc.date.available2024-01-12T21:03:38Z-
dc.date.issued1995-11-08-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/96612-
dc.title실리콘기판상에　성장된GaAs에피택셜층의　유기금속화학　증착법에　의한　델타－도핑형성　방법-
dc.typePatent-
dc.date.registration1995-11-08-
dc.date.application1991-07-31-
dc.identifier.patentRegistrationNumber1986262-
dc.identifier.patentApplicationNumber3-192166-
dc.publisher.countryJA-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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