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dc.contributor.author민석기-
dc.contributor.author김용태-
dc.date.accessioned2024-01-12T21:03:39Z-
dc.date.available2024-01-12T21:03:39Z-
dc.date.issued1994-03-23-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/96613-
dc.title실리콘　반도체소자의　금속배선　형성용텅스텐　질화　박막증착방법-
dc.typePatent-
dc.date.registration1994-03-23-
dc.date.application1991-07-16-
dc.identifier.patentRegistrationNumber72153-
dc.identifier.patentApplicationNumber91-12125-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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