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dc.contributor.author이준근-
dc.contributor.author김영욱-
dc.contributor.author박태희-
dc.contributor.author최헌진-
dc.date.accessioned2024-01-12T21:31:22Z-
dc.date.available2024-01-12T21:31:22Z-
dc.date.issued1998-12-15-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/97018-
dc.title이층　미세구조를　가지는　질화규소　소재　및　그의　제조방법-
dc.typePatent-
dc.date.registration1998-12-15-
dc.date.application1997-03-14-
dc.identifier.patentRegistrationNumber0183363-
dc.identifier.patentApplicationNumber1997-0008754-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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