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dc.contributor.author유명기-
dc.contributor.author홍경태-
dc.contributor.author백영준-
dc.date.accessioned2024-01-12T21:31:43Z-
dc.date.available2024-01-12T21:31:43Z-
dc.date.issued2001-03-26-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/97043-
dc.title반도체용　열방산체　및　그의　제조방법-
dc.typePatent-
dc.date.registration2001-03-26-
dc.date.application1998-07-28-
dc.identifier.patentRegistrationNumber292681-
dc.identifier.patentApplicationNumber98-30343-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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