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dc.contributor.author금동화-
dc.contributor.author김주성-
dc.contributor.author김진상-
dc.contributor.author이지화-
dc.date.accessioned2024-01-12T21:32:09Z-
dc.date.available2024-01-12T21:32:09Z-
dc.date.issued2002-07-12-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/97075-
dc.title질소　공급원으로서　질소　원자－활성　종을　사용하는　유기금속　화학증착에　의한　I I I족　금속　질화물　박막-
dc.typePatent-
dc.date.registration2002-07-12-
dc.date.application1999-11-30-
dc.identifier.patentRegistrationNumber0346015-
dc.identifier.patentApplicationNumber1999-0053735-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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