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dc.contributor.author유명기-
dc.contributor.author백영준-
dc.contributor.author김기수-
dc.date.accessioned2024-01-12T21:32:18Z-
dc.date.available2024-01-12T21:32:18Z-
dc.date.issued2002-11-28-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/97085-
dc.title합성　다이아몬드　웨이퍼의　평탄화　및연마　방법-
dc.typePatent-
dc.date.registration2002-11-28-
dc.date.application1999-09-21-
dc.identifier.patentRegistrationNumber364134-
dc.identifier.patentApplicationNumber99-40684-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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