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Other Titles

AlSb 화합물 반도체 유전함수의 온도의존성 연구

Authors

Jung Yong-Woo; 변준석; 황순용; 김태중; 김영동; Shin Sang Hoon; SONG, JIN-DONG

Citation

한국진공학회 하계대회, v.41, pp.136

Keywords

AlSb; ellipsometry; 타원편광분석; in-situ; 유전함수; 온도의존성; 전이점

URI

https://pubs.kist.re.kr/handle/201004/97414

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KIST Conference Paper > Others

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