DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorKang Min Gyu-
dc.contributor.authorDo Young Ho-
dc.contributor.authorOh Seung min-
dc.contributor.authorKANG, CHONG YUN-
dc.contributor.authorSahn Nahm-
dc.contributor.authorYOON, SEOK JIN-
dc.date.accessioned2024-01-12T21:38:07Z-
dc.date.available2024-01-12T21:38:07Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/97495-
dc.languageEnglish-
dc.subjectExcimer laser annealing-
dc.subjectBST-
dc.subjectthin film-
dc.subjectlow temperature-
dc.titleCrystallization of BST Thin Film by Excimer Laser Annealing Method for Embedded Capacitors-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitation2011 MRS SPRING MEETING-
dc.citation.title2011 MRS SPRING MEETING-
dc.citation.conferencePlaceUS-
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