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dc.contributor.author박승영-
dc.contributor.author민병철-
dc.contributor.author김상일-
dc.contributor.author조영훈-
dc.date.accessioned2024-01-12T22:02:43Z-
dc.date.available2024-01-12T22:02:43Z-
dc.date.issued2018-12-10-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/97689-
dc.title웨이퍼 검사장치-
dc.typePatent-
dc.date.registration2018-12-10-
dc.date.application2017-06-15-
dc.identifier.patentRegistrationNumber10-1929240-
dc.identifier.patentApplicationNumber2017-0075927-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2017
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