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dc.contributor.author백영준-
dc.contributor.author김원목-
dc.contributor.author이경석-
dc.contributor.author이택성-
dc.contributor.author정증현-
dc.contributor.author이수연-
dc.contributor.author박종극-
dc.date.accessioned2024-01-12T23:03:11Z-
dc.date.available2024-01-12T23:03:11Z-
dc.date.issued2010-05-24-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/98856-
dc.title박막 성장방법-
dc.typePatent-
dc.date.registration2010-05-24-
dc.date.application2008-06-27-
dc.identifier.patentRegistrationNumber0960595-
dc.identifier.patentApplicationNumber2008-0061513-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2008
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