DSpace at KIST: Fabrication and characterization of implantable and flexible nerve cuff electrodes with Pt, Ir, and IrOx films deposited by RF sputtering

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DC Field	Value	Language
dc.contributor.author	Jung jung hwan	-
dc.contributor.author	Kang, Ji Yoon	-
dc.contributor.author	Kim, Tae Song	-
dc.contributor.author	Lee, Soo Hyun	-
dc.date.accessioned	2024-01-12T23:04:38Z	-
dc.date.available	2024-01-12T23:04:38Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/98942	-
dc.language	English	-
dc.subject	cuff electrode	-
dc.subject	CDC	-
dc.subject	EIS	-
dc.subject	working pressure	-
dc.title	Fabrication and characterization of implantable and flexible nerve cuff electrodes with Pt, Ir, and IrOx films deposited by RF sputtering	-
dc.title.alternative	RF sputtering 방법으로 증착된 인체 삽입형 신경전극(Pt, Ir, IrOx)의 공정 방법 및 특성 비교분석	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한국 MEMS 학술대회	-
dc.citation.title	한국 MEMS 학술대회	-
dc.citation.conferencePlace	KO	-

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