DSpace at KISTKIST Patent2002

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dc.contributor.author이종호-
dc.contributor.author김태은-
dc.contributor.author임건자-
dc.contributor.author이해원-
dc.contributor.author김주선-
dc.date.accessioned2024-01-12T23:32:48Z-
dc.date.available2024-01-12T23:32:48Z-
dc.date.issued2004-10-28-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/99392-
dc.title화학적 기계적 평탄화 공정의 실시간 전기화학적 분석 장치-
dc.typePatent-
dc.date.registration2004-10-28-
dc.date.application2002-05-03-
dc.identifier.patentRegistrationNumber0456091-
dc.identifier.patentApplicationNumber2002-0024523-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2002
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