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dc.contributor.author문성욱-
dc.contributor.author오명환-
dc.contributor.author김민철-
dc.date.accessioned2024-01-12T23:33:40Z-
dc.date.available2024-01-12T23:33:40Z-
dc.date.issued2002-03-07-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/99455-
dc.title다층박막법을 이용한 반도체 소자의 제조방법-
dc.typePatent-
dc.date.registration2002-03-07-
dc.date.application2000-05-04-
dc.identifier.patentRegistrationNumber329241-
dc.identifier.patentApplicationNumber00-23920-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2000
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