Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 문성욱 | - |
dc.contributor.author | 오명환 | - |
dc.contributor.author | 김민철 | - |
dc.date.accessioned | 2024-01-12T23:33:40Z | - |
dc.date.available | 2024-01-12T23:33:40Z | - |
dc.date.issued | 2002-03-07 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/99455 | - |
dc.title | 다층박막법을 이용한 반도체 소자의 제조방법 | - |
dc.type | Patent | - |
dc.date.registration | 2002-03-07 | - |
dc.date.application | 2000-05-04 | - |
dc.identifier.patentRegistrationNumber | 329241 | - |
dc.identifier.patentApplicationNumber | 00-23920 | - |
dc.publisher.country | KO | - |
dc.type.iprs | 특허 | - |
dc.contributor.assignee | 한국과학기술연구원 | - |
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