DSpace at KIST: Characterization of fluorocarbon fhin films deposited by ICP and PP

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DC Field	Value	Language
dc.contributor.author	Lee Ji-hye	-
dc.contributor.author	K. Kim	-
dc.contributor.author	LEE, YEON HEE	-
dc.date.accessioned	2024-01-12T23:35:20Z	-
dc.date.available	2024-01-12T23:35:20Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/99560	-
dc.language	English	-
dc.subject	fluorocarbon	-
dc.subject	pulsed plasma	-
dc.subject	ICP	-
dc.subject	XPS	-
dc.subject	TOF-SIMS	-
dc.title	Characterization of fluorocarbon fhin films deposited by ICP and PP	-
dc.type	Conference	-
dc.description.journalClass	1	-
dc.identifier.bibliographicCitation	5th International symposium on practical surface on practical surface analysis, v.5, pp.164	-
dc.citation.title	5th International symposium on practical surface on practical surface analysis	-
dc.citation.volume	5	-
dc.citation.startPage	164	-
dc.citation.conferencePlace	JA	-

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