염화실란의 불균등화 반응에 대한 실란의 제조방법

Author
정일남임천수조교동
Assignee
한국과학기술연구원
Regitration Date
1994-08-26
Registration No.
1868090
Application Date
1985-04-24
Application No.
60-086610
Country
JA
URI
https://pubs.kist.re.kr/handle/201004/99766
Appears in Collections:
KIST Patent > Others
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