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dc.contributor.author이동헌-
dc.contributor.author정형진-
dc.contributor.author이전국-
dc.contributor.author김태송-
dc.date.accessioned2024-01-13T00:01:50Z-
dc.date.available2024-01-13T00:01:50Z-
dc.date.issued1999-10-18-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/99887-
dc.titleN2O반응　가스를　이용한　산화물　박막 증착방법-
dc.typePatent-
dc.date.registration1999-10-18-
dc.date.application1997-07-07-
dc.identifier.patentRegistrationNumber0239008-
dc.identifier.patentApplicationNumber1997-0031340-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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