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dc.contributor.author박용주-
dc.contributor.author민석기-
dc.contributor.author김은규-
dc.date.accessioned2024-01-13T00:02:20Z-
dc.date.available2024-01-13T00:02:20Z-
dc.date.issued2000-08-03-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/99922-
dc.title전자싸이크로트론 공명 플라즈마에서 활성이온 및 활성분자(또는 활성원 자)생성율 제어방법-
dc.typePatent-
dc.date.registration2000-08-03-
dc.date.application1997-11-04-
dc.identifier.patentRegistrationNumber270607-
dc.identifier.patentApplicationNumber97-57886-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > Others
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