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dc.contributor.author고석근-
dc.contributor.author정형진-
dc.contributor.author변동진-
dc.contributor.author금동화-
dc.contributor.author최원국-
dc.date.accessioned2024-01-13T00:02:32Z-
dc.date.available2024-01-13T00:02:32Z-
dc.date.issued2001-07-27-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/99936-
dc.title이온빔을　이용한　산화물　기판표면의 전처리방법　및　이를　이용한　질화물 박막　형성　방법-
dc.typePatent-
dc.date.registration2001-07-27-
dc.date.application1998-11-16-
dc.identifier.patentRegistrationNumber3215674-
dc.identifier.patentApplicationNumber10-325071-
dc.publisher.countryJA-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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