Browsing by Subject ICP-RIE

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Showing results 1 to 9 of 9

Issue DateTitleAuthor(s)
2008-04Characteristics and fabrication of nanohole array on InP semiconductor substrate using nanoporous alumina정미; 이석; 변영태, et al
2009-08Effect of reactive gas of fluorides on Si etching by using ICP-RIE김상헌; 정성목; 김영환
2006-10Enhancement of PL Intensity by Photonic Crystal fabricated on GaAs Substrate using Nanoporous Alumina Mask정미; 이석; 박민철, et al
2004-12Etch stop characteristics of SrBi2Ta2O9 thin film by using CeO2 buffer layer권영석; 심선일; 김성일, et al
2007-06Fabrication of Size Controlled Nanohole Array on III-V Semiconductor substrate by ICP-RIE using Nanoporous Alumina Mask정미; 이석; 변영태, et al
2006-09Fabrication of Size Controlled Nanohole Array on III-V Semiconductor substrate by ICP-RIE using nanoporous alumina mask정미; 이석; 변영태, et al
2006-04Formation of 30 nm GaAs Nanohole Array by ICP-RIE using Nanoporous Alumina Mask정미; 변영태; 전영민, et al
2006-02Formation of GaAs Nanohole Array using Nanoporous Alumina Mask by Inductively Coupled Plasma Reactive Ion Etching정미; 정용우; 이석, et al
2006-11PL characteristic and fabrication of photonic crystal structure on GaAs Substrate using nanoporous alumina정미; 백제현; 이석, et al

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