Showing results 3 to 4 of 4
Issue Date | Title | Author(s) |
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- | Characteristics of the Coherent EUV Light Source for EUV Metrology | Kim Yong Soo; Kim Younghee; Park June; Hamin Sung; Jomsool Kim; Ju Han Lee; Jhon, Young Min |
- | Optimization of High Harmonic Generation of Coherent EUV Light for EUV Metrology: Simulations and Experiments | Jung Min Ki; Yong Soo Kim; Kim Younghee; Kim, Yong Tae; Hamin Sung; Jomsool Kim; Ju Han Lee; Jhon, Young Min |