Showing results 3 to 4 of 4
Issue Date | Title | Author(s) |
---|---|---|
- | Multilayer barrier film fabricated by Plasma Enhanced Chemical Vapor Deposition and Atomic Layer Deposition | Jin Chang Kyu; Do Kyung Hwang; Tae-Hwan Kimb; CHOI, WON-KOOK |
- | SiOXNY Encapsulation film Fabricated by Plasma Enhanced Chemical Vapor Deposition | Jin Chang Kyu; Do Kyung Hwang; Tae-Hwan Kim; CHOI, WON-KOOK |