DSpace at KIST

Browsing bySubjectmask inspection

Jump to:
All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
가 나 다 라 마 바 사 아 자 차 카 타 파 하
  • Sort by:
  • In order:
  • Results/Page
  • Authors/Record:

Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2016-10Accurate characterization of mask defects by combination of phase retrieval and deterministic approachLEPORTIER, THIBAULT LOUIS DAVID; Park, Min-Chul; Kim, Wooshik; Song, Jin Dong
-Coherent scattering stereoscopic microscopy for mask inspection of extreme ultra-violet lithographyKim Ki Hyuk; Cho Jung-gyn; Park, Min-Chul; Ju, Byeong-Kwon; Cho Sung-jin; Son, Jung-Young
1

BROWSE