Showing results 2 to 2 of 2
Issue Date | Title | Author(s) |
---|---|---|
2020-09 | Wafer-scale Fabrication of Nanometer Silicon Posts for Capacitive Micromachined Ultrasonic Transducers with Substrate-Embedded Springs | Kim, Hae Youn; Kang, Dong-Hyun; Lee, Byung Chul; Khuri-Yakub, Butrus T.; Kim, Jinsik |