Browsing by Author 양성훈

Jump to:
All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
  • Sort by:
  • In order:
  • Results/Page
  • Authors/Record:

Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
1998-04Reliability of Cu/W-N thin films deposited on low dielectric constant SiO:F ILD이석형; 김동준; 양성훈; 박정원; 손세일; 오경희; 김용태; 박종완
1999-01Thermal stability enhancement of Cu/WN/SiOF/Si multilayers by post-plasma treatment of fluorine-doped silicon dioxide이석형; 김동준; 양성훈; 박정원; 손세일; 오경희; 김용태; 김정열; 염근영; 박종완