Showing results 1 to 1 of 1
Issue Date | Title | Author(s) |
---|---|---|
1998-12 | Study of electron energy distribution functions (EEDFs) in three DC low-pressure plasma sources | Antonova, T; Bougrov, G; Bougrova, A; Choi, WK; Goncharov, L; Jung, HJ; Koh, SK; Kondranin, S; Kralkina, E; Sitin, E; Obukhov, V |