Study of electron energy distribution functions (EEDFs) in three DC low-pressure plasma sources

Authors
Antonova, TBougrov, GBougrova, AChoi, WKGoncharov, LJung, HJKoh, SKKondranin, SKralkina, ESitin, EObukhov, V
Issue Date
1998-12
Publisher
JAPAN J APPLIED PHYSICS
Citation
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.37, no.12B, pp.6906 - 6915
Abstract
In the present paper the possibility of application of the regularization method for reliable determination of the position and form of structural features of electron energy distribution is considered. The regularization method is used in the processing of the probe characteristics, measured in gas discharge chambers of broad beam gridded Xe ion sources, with peripheral and with divergent magnetic fields, as well as in an ion accelerator with closed electron drift. Electron energy distribution functions with secondary maxima are observed in the plasma devices.
Keywords
regularization method; electron energy distribution function; broad beam gridded Xe ion sources; peripheral/divergent magnetic field
ISSN
0021-4922
URI
https://pubs.kist.re.kr/handle/201004/142698
DOI
10.1143/JJAP.37.6906
Appears in Collections:
KIST Article > Others
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