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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2024-12Intense Pulsed Light Annealing for High-k Capacitor Integration in 1T-1C DRAM With a-IGZO Cell TransistorsKim, Heetae; Park, Seohak; Jeong, Johak; Jeon, Jihoon; Lee, Hoseok; Sung, Chihun; Na, Jeho; Kim, Min Ju; Kim, Seong Keun; Choi, Sung-Yool; Heo, Keun; Cho, Sung Haeng; Cho, Byung Jin
2024-08Low temperature crystallization of atomic-layer-deposited SrTiO3 films with an extremely low equivalent oxide thickness of sub-0.4 nmChung, Hong Keun; Jeon, Jihoon; Kim, Han; Jang, Myoungsu; Kim, Sung-Chul; Won, Sung Ok; Baek, In-Hwan; Chung, Yoon Jang; Han, Jeong Hwan; Cho, Sung Haeng; Park, Tae Joo; Kim, Seong Keun
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