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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2006-12The C2H2 gas effect on the growth behavior of remote plasma enhanced CVD SiC : H filmCho, Sung Hyuk; Lee, Young Jin; Choi, Doo Jin; Kim, Tae Song
2007-12The deposition behavior of SiC : H films deposited using a remote PECVD system with an HMWS precursor and C2H2 dilution gasCho, Sung Hyuk; Lee, Young Jin; Choi, Doo Jin; Kim, Tae Song
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